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| Partname: | EE-SPY802 |
| Description: | Wafer-carrier Mounting Photomicrosensors |
| Manufacturer: | |
| Datasheet: | PDF (204K).
Click here to download *) |
The mounting position is set with a pedestal. The contact surface with the wafer carrier uses a special chemical-resistant fluoro-resin. The unique optical system enables stable detection of almost all wafer-carriers. |
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Click here to download EE-SPY802 Datasheet*) |
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