The MMAS500G family of silicon capacitive, micromachined accelerometers features integral signal amplification, signal conditioning, a 4pole lowpass filter and temperature compensation. ZeroG offset, full scale span and filter rolloff are factory set and require no external passives. A calibrated selftest feature mechanically displaces the seismic mass with the application of a digital selftest signal. The device is offered in either of two plastic packages, thereby accommodating various axis orientation requirements. The MMAS500G incorporates a single polysilicon seismic mass, suspended between two fixed polysilicon plates (Gcell). The forces of acceleration move the seismic mass, thereby resulting in a change in capacitance. The Gcell is sealed at the die level, creating a particlefree environment. The Gcell features builtin damping and overrange stops to protect it from mechanical shock.