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MSM66573 series datasheets. Manufacturer: OKI.

MSM66573-TB16-bit microcontroller in 100-pin TQFP package. Operational temperature range from -30°C to 70°C.Datasheet*)
MSM66573L-TB16-bit microcontroller in 100-pin TQFP package. Operational temperature range from -30°C to 70°C.Datasheet*)
MSM66P573-TB16-bit microcontroller in 100-pin TQFP package. Operational temperature range from -30°C to 70°C.Datasheet*)
MSM66Q573-TB16-bit microcontroller in 100-pin TQFP package. Operational temperature range from -30°C to 70°C.Datasheet*)
MSM66Q573L-TB16-bit microcontroller in 100-pin TQFP package. Operational temperature range from -30°C to 70°C.Datasheet*)
MSM6657316-Bit MicrocontrollerDatasheet*)
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